Characterization of inductively coupled RF plasmas for plasma-assisted mist CVD of ZnO films
نویسندگان
چکیده
منابع مشابه
Non-equilibriummodeling of Inductively Coupled Rf Plasmas
This paper discusses the modeling of non-equilibrium effects in inductively coupled plasma facilities. The model relies on the solution of the Navier-Stokes and Maxwell equations in a one-dimensional geometry. Steady-state solutions are obtained by means of an implicit Finite Volume method. Non-equilibrium effects are treated by means of a hybrid State-to-State formulation. The electronic state...
متن کاملMicrowave assisted digestion coupled with inductively coupled plasma optical emission spectrometry for determining element concentrations in halophytes
Introduction: This study was carried out to determine elements (Li, Na, K, Mg, Ca, Ba, B, Al, Si, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Se, Ag and P) in the Suaeda vermiculata (S. vermiculata) and Suaeda aegyptiaca (S. aegyptiaca) in three different regions of Southern Iran using inductively coupled plasma optical emission spectrometry (ICP-OES) after microwave-assisted acid digestion. Materials and ...
متن کاملInductively coupled plasmas at low driving frequencies
We discuss the peculiarities of inductively coupled plasma (ICP) at low driving frequencies. The ratio of electric to magnetic field, E cB , ∣ ( )∣ decreases with decreasing frequency according to Faraday’s law—higher magnetic fields are required to induce the same electric field at lower frequencies. We point out that the ratio of E cB ∣ ( )∣ can be non-uniform in space depending on primary co...
متن کاملNonlocal power deposition in inductively coupled plasmas.
Radiofrequency (rf) plasmas exhibit field penetration well beyond the classical skin depth. Two physical explanations are proposed. First, by tracing orbits of electrons through many rf cycles in a cylindrical system, it is shown that numerous ionizing electrons can reach the interior. Second, current-carrying electrons can form a long-lived torus that drifts toward the axis, causing frequently...
متن کاملNonlinear effects in inductively coupled plasmas
Nonlinear effects in an inductive discharge have been studied experimentally and theoretically in a low pressure and low frequency operational regime. Plasma dynamics at these conditions is strongly nonlinear due to inertial and Lorentz forces. Nonlinear plasma polarization at the second harmonic and mean ~ponderomotive! potential as well as generation of the electric current at the second harm...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2012
ISSN: 1742-6596
DOI: 10.1088/1742-6596/379/1/012031